Quartz Glass Products

Quartz Glass for Furnace

semiQuarz manufactures quartz glass components for the CVD/ Diffusion furnace technology, which is for depositing different substrates on the wafer surface.

  • Adapter Plate
  • Ampule
  • Baffle
  • Balloon
  • Boats
  • Cap Covers
  • Caps
  • Carrier
  • CVD Tubes
  • Doors
  • Dust Covers
  • Exhaust / Inlet Tubes
  • Exhaust Ring
  • Fin Pedestal
  • Heat Shield
  • Holder Boats
  • Injectors
  • Joints
  • Liner
  • Manifold Cover
  • Nozzle
  • Paddle
  • Pedestal
  • Plate Holder
  • Process Tube
  • Ring-Boats
  • Shutter
  • Sleeve
  • Substrathalterplatten
  • Suspension Ring
  • TC-Sheath
  • Torch Chamber
  • Tube Pedestal

We manufacture and repair the following manufacturers’ quartz glass products:

  • ASM
  • ATV
  • AVIZA
  • Centrotherm
  • Kokusai BTU, BTI)
  • Koyo Lindberg
  • SEMCO
  • TEMPRESS
  • Thermco
  • TEL
Quartz Glass for Furnace